Sensirion SFC6000D Mass Flow Controllers
Sensirion SFC6000D Mass Flow Controllers are small, lightweight, and ideal for optimizing the size and weight of portable devices. The Sensirion SFC6000D has excellent repeatability, accuracy, control range, and speed. This highly integrated controller uses Sensirion's CMOSens® MEMS technology and thermal-mass measurement principle. The SFC6000 doesn't drift or require in-service re-calibration, thanks to a low number of electronic components. Selected configurations are available for immediate delivery.
Features
- Price-performance ratio with 2%/0.2% accuracy/repeatability
- Opens up applications where a mass flow controller is traditionally too costly
- Wide control range (0.2%-100% full scale)
- Calibrated for multiple gasses with exchangeable fittings
- Digital RS485 interface
- Compact and lightweight
- Integrated design with few electronic components
- Robust supply chain to enhance supply safety
- No drift and re-calibration is required in the field
- EK-F5x evaluation kit for quick and easy testing
Applications
- Semiconductor
- Analytical instruments
- Medical equipment
- Industrial automation
Videos
Additional Resources
- Application Note SFC6000/SFM6000 Mass Flow Controller/Meter
- Preliminary Datasheet SFC6000D Mass Flow Controller and SFM6000D Flow Meter
- Quick Start Guide for Mass Flow Controller Kit
- Calibration Certification – Gas Flow Sensors
- Engineering Guidelines for Mass Flow Meters
- REACH- and RoHS - Declaration
- Gas Flow Sensors Experts in Flow Sensing
- Inert Gas Purging in Processing Industries
- Gas Control in Arc Welding
- Front Opening Unified Pods (FOUP)
Evaluation Kits
Sensirion Evaluation Kit for SFC6 & SFM6 Controllers
Used to test SFC6 and SFM6 mass flow controllers.
Sensirion SEK-SFM Mass Flow Meter Evaluation Kits
Quickly & easily evaluate Mass Flow Meters, comes with flow sensor, cable & downloadable software.
Related Products
Sensirion SFM6000D Mass Flow Meters
Valve-less SFC6000 mass flow controller variants.
Published: 2023-03-06
| Updated: 2025-08-20